Document Type

Article

Publication Date

2003

Publication Title

Applied Physics Letters

Volume

83

First page number:

2904

Last page number:

2906

Abstract

This letter demonstrates the ability to fabricate porous silicon through the nanoscale pores of an anodized alumina template formed on a silicon substrate. The alumina template acts as a protective coating on the porous silicon surface increasing its mechanical integrity, thus eliminating the need for delicate handling that is usually required for this material system. The optical properties of the porous silicon formed through the template show characteristics similar to that of normally formed porous silicon. In addition, the porous siliconoptical properties show very little degradation with time; the alumina coating is believed to contribute to this improved stability. The results are significant and can increase the likelihood of commercial applications of this material.

Keywords

Nanofabrication; Optical coatings; Optical properties; Porous materials Protective coatings; Silicon

Disciplines

Electrical and Computer Engineering | Engineering

Language

English

Permissions

Copyright American Institute of Physics. Used with permission.

Identifier

DOI: http://dx.doi.org/10.1063/1.1614842

UNLV article access

Search your library

Share

COinS