This letter demonstrates the ability to fabricate porous silicon through the nanoscale pores of an anodized alumina template formed on a silicon substrate. The alumina template acts as a protective coating on the porous silicon surface increasing its mechanical integrity, thus eliminating the need for delicate handling that is usually required for this material system. The optical properties of the porous silicon formed through the template show characteristics similar to that of normally formed porous silicon. In addition, the porous siliconoptical properties show very little degradation with time; the alumina coating is believed to contribute to this improved stability. The results are significant and can increase the likelihood of commercial applications of this material.
Nanofabrication; Optical coatings; Optical properties; Porous materials Protective coatings; Silicon
Electrical and Computer Engineering | Engineering
Copyright American Institute of Physics. Used with permission.
McGinnis, S. P.
Formation of porous silicon through the nanosized pores of an anodized alumina template.
Applied Physics Letters, 83