Title

Template Based nanofabrication: Mechanical Characterization of Film-substrate Interface

Document Type

Conference Proceeding

Publication Date

5-9-2005

Publisher

SPIE

First page number:

959

Last page number:

967

Abstract

This paper presents the results of investigations of thin film alumina templates fabricated on silicon and other substrates. Such templates are of significant interest for the low-cost implementation of semiconductor and metal nanostructure arrays. In addition, thin film alumina templates on silicon have the potential for nanostructure integration with silicon electronics. Formation of thin film alumina templates on silicon substrates was investigated under different fabrication conditions, and the dependence of pore morphology and pore formation rate on process parameters was evaluated. In addition, process conditions for improved pore size distribution and periodicity were determined. The template/silicon interface, important for nanostructure integration on silicon, was investigated using different techniques. Thin film alumina templates on non-silicon substrates such as glass, indium-tin-oxide-coated glass and silicon carbide were also investigated.

Keywords

Composite materials; Electronics; Fabrication; Glass; Indium; Interfaces; Manufacturing processes; Nano-fabrication; Nano-structures; Nanocomposites (Materials); Nanostructured materials; Nanostructures; Oxides; Silicon; Thin films

Disciplines

Electrical and Computer Engineering | Nanotechnology Fabrication

Language

English

Comments

From: Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics
Sevilla, Spain | May 09, 2005

Permissions

Use Find in Your Library, contact the author, or interlibrary loan to garner a copy of the item. Publisher policy does not allow archiving the final published version. If a post-print (author's peer-reviewed manuscript) is allowed and available, or publisher policy changes, the item will be deposited.

Identifier

DOI: http://dx.doi.org/10.1117/12.621976

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