Capacitance-voltage Characterization of Thin Film nanoporous Alumina Templates

Document Type

Article

Publication Date

8-2006

Publication Title

Microelectronics Journal

Volume

37

Issue

8

First page number:

695

Last page number:

699

Abstract

This paper presents the results of capacitance–voltage characterization of thin film alumina templates fabricated on silicon substrates. Such templates are of significant interest for the low-cost implementation of semiconductor and metal nanostructure arrays, as well as for potential nanostructure integration with silicon electronics. Thin film alumina templates created on silicon substrates under different anodization conditions were investigated. Capacitance–voltage measurements indicate that the template/silicon interface, important for nanostructure integration on silicon, to be of good device quality.

Keywords

Nanostructure integration on silicon; Nanoporous dielectric; Nanostructure C–V characteristics

Disciplines

Electrical and Computer Engineering | Engineering | Signal Processing

Language

English

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