Simulation of the Diaphragm Properties of a PZT-based Valveless Micropump

Authors

Wensheng Hou, Chongqing University
Biswajit Das, University of Nevada, Las VegasFollow
Yanan Jiang, University of Nevada, Las VegasFollow
Shizhi Qian, Old Dominion UniversityFollow
Xiaolin Zheng, Chongqing UniversityFollow
X. Pi, Chongqing UniversityFollow
J. Yang, Chongquing UniversityFollow
H. Liu, Chongquing University
J. Zheng, Chongquing University
Z. Zheng, Chongquing UniversityFollow

Document Type

Conference Proceeding

Publication Date

1-6-2008

Publication Title

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Publisher

IEEE

First page number:

449

Last page number:

452

Abstract

PZT-based micropump is a broadly studied microactuator that could be potentially used for controlling and delivering tiny amounts of fluids as it has simple structure and no internal moving parts. This paper presents a PZT-based micropump which pump fluid via the motion of diaphragm bonded to the piezoelectric element. The mechanical properties of diaphragm driven by input voltages have been analyzed here with ANSYS. The simulation results indicate that the profile of either displacement or velocity of diaphragm is a parabolic surface, in which the maximal value occurred in the central area of diaphragm, and the minimal value occurred at the boundary. Furthermore, the activities of vibration membrane of micropump would be controlled by the driving voltage and thickness of PZT patch, and the displacement of vibration membrane would increase with either the increment of driving voltage or decrement of PZT thickness. The proposed micropump can be potentially integrated into a transdermal drug delivery system, and the simulation results demonstrate its utility as an efficient tool for PZT-based micropump design.

Keywords

Biomembranes; Bonding; Displacement control; Mechanical factors; Membranes (Biology); Microactuators; Micropumps; Piezoelectric devices; Pumps; Thickness control; Vibration control; Voltage control

Disciplines

Biomedical | Biomedical Engineering and Bioengineering | Controls and Control Theory | Electrical and Electronics

Language

English

Comments

Conference held: Sanya, 6-9 Jan. 2008

Permissions

Use Find in Your Library, contact the author, or interlibrary loan to garner a copy of the item. Publisher policy does not allow archiving the final published version. If a post-print (author's peer-reviewed manuscript) is allowed and available, or publisher policy changes, the item will be deposited.

Repository Citation

Hou, W., Das, B., Jiang, Y., Qian, S., Zheng, X., Pi, X., Yang, J., Liu, H., Zheng, J., Zheng, Z. (2008). Simulation of the Diaphragm Properties of a PZT-based Valveless Micropump. 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems 449-452. IEEE.