Solution processed SiNxCyOz thin films thermally transformed from silicon oxide/melamine hybrid system

Authors

Jaehun Jeong, Sungkyunkwan University
Kan Fujihara, KANEKA Corporation
Lyongsun Pu, Sungkyunkwan University
Ji-Beom Yoo, Sungkyunkwan University
Sung M. Cho, Sungkyunkwan University
Youngkwan Lee, Sungkyunkwan UniversityFollow
Seong Woo Kim, Kyonggi UniversityFollow
Taeseon Hwang, University of Nevada, Las VegasFollow
Jae Do Nam, Sungkyunkwan University, SuwonFollow

Document Type

Article

Publication Date

7-31-2013

Publication Title

Thin Solid Films

Volume

539

First page number:

294

Last page number:

302

Abstract

In this study, a solution-processable precursor of melamine and silicon oxide, was prepared and thermally converted into inorganic thin films of SiN_xC_yO_z. Using tetra-ethoxysilane and hydroxyl-methyl-melamine, a transparent coating with a high loading content of silica of up to 50% was achieved through the hydrolysis/condensation reactions, which provided a transmittance of 85.1% (thickness of 1.5 ± 0.2 μm) and hard coating grade of 4H pencil test. When the silica/melamine coating was further heat-treated up to 900 °C in an inert environment, the organic melamine was converted into an inorganic compound composed of Si, N, C, and O atoms in the form of SiN_xC_yO_z. The relative compositions of films varied with the heat-treatment temperature, e.g., providing SiN_0.03C_0.59O_1.87 for the thin film heat-treated at 700 °C. The resulting inorganic thin films were mechanically strong and optically shiny with a low root mean square of roughness (< 1.0 nm) giving dielectric constants varying from 2.75 to 1.82 with heat treatment temperature that could be used as low-k materials in commercialized optoelectronic devices.

Keywords

Coatings; Dielectrics; Electrooptical devices; Hardness; Low dielectric constant; Silicon-based thin films; Silicon oxide; Sol–gel reaction; Solution-processable; Thin films

Disciplines

Chemical Engineering | Materials Science and Engineering | Mechanical Engineering

Language

English

Permissions

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Repository Citation

Jeong, J., Fujihara, K., Pu, L., Yoo, J., Cho, S. M., Lee, Y., Kim, S. W., Hwang, T., Nam, J. D. (2013). Solution processed SiNxCyOz thin films thermally transformed from silicon oxide/melamine hybrid system. Thin Solid Films, 539 294-302.